Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio
Bourrier, David, Ghannam, A., Dilhan, M., Granier, H.Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2071-5
Date:
October, 2014
File:
PDF, 589 KB
english, 2014