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Orthogonal and fine lithographic structures attained from the next generation proton beam writing facility
Yao, Y., Santhana Raman, P., van Kan, J. A.Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2066-2
Date:
October, 2014
File:
PDF, 338 KB
english, 2014