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LIGA micro-openings for coherence characterization of X-rays
Nazmov, V., Kluge, M., Last, A., Marschall, F., Mohr, J., Vogt, H., Simon, R.Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2056-9
Date:
October, 2014
File:
PDF, 507 KB
english, 2014