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Performance evaluation of five-DOF motion in ultra-precision linear stage
Lee, Kwang-Il, Lee, Jae-Chang, Yang, Seung-HanVolume:
15
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-013-0315-4
Date:
January, 2014
File:
PDF, 652 KB
english, 2014