Millimeter-Scale Piezoresistive Cantilevers for Accurate...

Millimeter-Scale Piezoresistive Cantilevers for Accurate Force Measurements at the Nano-Newton Level

Kim, Min-Seok, Park, Yon-Kyu, Kim, Jong-Ho
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Volume:
28
Language:
english
Journal:
MAPAN
DOI:
10.1007/s12647-013-0084-7
Date:
December, 2013
File:
PDF, 632 KB
english, 2013
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