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3D nanometer features by ultra precision machining
Haskic, Kurt, Kühne, Stefan, Löchel, Bernd, Schmidt, MartinVolume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2059-6
Date:
October, 2014
File:
PDF, 261 KB
english, 2014