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Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor
Bensidhoum, M. T., Laghrouche, M., Sidi Said, A., Montes, L., Boussey, J.Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1977-7
Date:
January, 2014
File:
PDF, 840 KB
english, 2014