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Accumulation of products of ferroelectric target sputtering in the plasma of an RF glow discharge
Zinchenko, S. P., Tolmachev, G. N.Volume:
39
Language:
english
Journal:
Plasma Physics Reports
DOI:
10.1134/S1063780X13050176
Date:
December, 2013
File:
PDF, 275 KB
english, 2013