Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles
Li, Huawei, Fan, Yiqiang, Conchouso, David, Foulds, Ian G.Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2031-5
Date:
February, 2015
File:
PDF, 479 KB
english, 2015