Rapid Growth of Hard and Compact Layers of Stoichiometric ZrN by DC Reactive Magnetron Sputtering Pulsed at Low Frequency
J. P. Dauchot, R. Gouttebaron, M. Wautelet, M. HecqVolume:
2
Year:
2000
Language:
english
Pages:
4
DOI:
10.1002/1527-2648(200012)2:123.0.co;2-i
File:
PDF, 294 KB
english, 2000