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Effect of the formation conditions on the properties of ZnO:Ga thin films deposited by magnetron-assisted sputtering onto a cold substrate
Gromov, D. G., Koz’min, A. M., Shulyat’ev, A. S., Polomoshnov, S. A., Bogolyubova, D. N., Shamanaev, S. V.Volume:
47
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782613130083
Date:
December, 2013
File:
PDF, 218 KB
english, 2013