Mechanical material characterization of photosensitive...

Microsystem Technologies 2014 / 10 Vol. 20; Iss. 10-11

Mechanical material characterization of photosensitive polymers

Vogel, J., Feige, H.-J., Saupe, J., Schubert, S., Grimm, J.
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2028-0
Date:
October, 2014
File:
PDF, 783 KB
english, 2014
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