Versatile pattern generation of periodic, high aspect ratio...

Nanoscale Research Letters 2013 / 12 Vol. 8; Iss. 1

Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale

Ho, Jian-Wei, Wee, Qixun, Dumond, Jarrett, Tay, Andrew, Chua, Soo-Jin
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Volume:
8
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/1556-276X-8-506
Date:
December, 2013
File:
PDF, 818 KB
english, 2013
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