Zigzag structures obtained by anisotropic etching of macroporous silicon
Chernienko, A. V., Astrova, E. V., Zharova, Yu. A.Volume:
39
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785013110175
Date:
November, 2013
File:
PDF, 372 KB
english, 2013