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Study of Low-Cost Electrical Test Strategies for Post-Silicon Yield Improvement of MEMS Convective Accelerometers
Rekik, Ahmed Amine, Azaïs, Florence, Mailly, Frédérick, Nouet, PascalVolume:
30
Language:
english
Journal:
Journal of Electronic Testing
DOI:
10.1007/s10836-013-5423-7
Date:
February, 2014
File:
PDF, 1015 KB
english, 2014