A high sensitive and robust controllable MEMS gyroscope with inherently linear control force using a high performance 2-DOF oscillator
Deyhim, Zahra, Yousefi, Zeinab, Ghavifekr, Habib Badri, Aghdam, Esmaeil NajafiVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1984-8
Date:
January, 2015
File:
PDF, 1.26 MB
english, 2015