Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching
Kang, Yuji, Haruyama, Yuichi, Matsui, ShinjiVolume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1969-7
Date:
October, 2014
File:
PDF, 653 KB
english, 2014