Evaluation of Young’s modulus of imprinted hydrogen...

Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching

Kang, Yuji, Haruyama, Yuichi, Matsui, Shinji
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1969-7
Date:
October, 2014
File:
PDF, 653 KB
english, 2014
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