![](/img/cover-not-exists.png)
Tribochemical interaction between nanoparticles and surfaces of selective layer during chemical mechanical polishing
Ilie, FilipVolume:
15
Language:
english
Journal:
Journal of Nanoparticle Research
DOI:
10.1007/s11051-013-1997-3
Date:
November, 2013
File:
PDF, 415 KB
english, 2013