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A method for determining the state of the silicon-sapphire boundary in thin silicon-on-sapphire layers
Tikhov, S. V., Pavlov, D. A., Krivulin, N. O.Volume:
42
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739712080173
Date:
December, 2013
File:
PDF, 234 KB
english, 2013