Theoretical Chemistry Accounts: Theory, Computation, and Modeling (Theoretica Chimica Acta)
2013 / 12 Vol. 132; Iss. 12
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Adsorption and surface diffusion of silicon growth species in silicon carbide chemical vapour deposition processes studied by quantum-chemical computations
Kalered, Emil, Pedersen, Henrik, Janzén, Erik, Ojamäe, LarsVolume:
132
Language:
english
Journal:
Theoretical Chemistry Accounts
DOI:
10.1007/s00214-013-1403-3
Date:
December, 2013
File:
PDF, 846 KB
english, 2013