Achievement of a near-perfect smooth silicon surface
Li, Jing, Liu, YuHong, Dai, YuanJing, Yue, DaChuan, Lu, XinChun, Luo, JianBinVolume:
56
Language:
english
Journal:
Science China Technological Sciences
DOI:
10.1007/s11431-013-5364-5
Date:
November, 2013
File:
PDF, 988 KB
english, 2013