Photolithography enhancement by incorporating...

Photolithography enhancement by incorporating photoluminescent nanoscale cesium iodide molecular dots into the photoresists

Tao, Tao, Yang, Zhi, Su, Yanjie, Wei, Hao, Sharma, Poonam, Wei, Liangming, Kong, Eric Siu-Wai, Zhang, Yafei
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Volume:
15
Language:
english
Journal:
Journal of Nanoparticle Research
DOI:
10.1007/s11051-013-1991-9
Date:
October, 2013
File:
PDF, 408 KB
english, 2013
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