Photolithography enhancement by incorporating photoluminescent nanoscale cesium iodide molecular dots into the photoresists
Tao, Tao, Yang, Zhi, Su, Yanjie, Wei, Hao, Sharma, Poonam, Wei, Liangming, Kong, Eric Siu-Wai, Zhang, YafeiVolume:
15
Language:
english
Journal:
Journal of Nanoparticle Research
DOI:
10.1007/s11051-013-1991-9
Date:
October, 2013
File:
PDF, 408 KB
english, 2013