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Effect of AlN buffer layer on the microstructure and bandgap of AlN films deposited on sapphire substrates by pulsed laser deposition
He, Huan, Huang, Lirong, Xiao, Min, Fu, Yuechun, Shen, Xiaoming, Zeng, JianminVolume:
24
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-013-1431-8
Date:
November, 2013
File:
PDF, 231 KB
english, 2013