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Characterization of polycrystalline silicon-oxide-nitride-oxide-silicon devices on a SiO2or Si3N4buffer layer
Lee, Sang-Youl, Oh, Jae-Sub, Yang, Seung-Dong, Yun, Ho-Jin, Jeong, Kwang-Seok, Kim, Yu-Mi, Lee, Hi-Deok, Lee, Ga-WonVolume:
9
Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-013-3176-1
Date:
October, 2013
File:
PDF, 520 KB
english, 2013