A study of the relationship between stick-slip and...

Journal of Mechanical Science and Technology 2013 / 10 Vol. 27; Iss. 10

A study of the relationship between stick-slip and micro-scratches generation during chemical-mechanical polishing process

Jung, Soyoung, Yang, Woo Yul, Sung, In-Ha
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Volume:
27
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-013-0818-z
Date:
October, 2013
File:
PDF, 1.08 MB
english, 2013
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