Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2013 / 09 Vol. 7; Iss. 5
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Fractal-like structures formed in the interelectrode gap during grid ion-source electrode sputtering
Madeev, S. V., Semenov, A. A., Khartov, S. A., Shkarban, I. I.Volume:
7
Language:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451013050352
Date:
September, 2013
File:
PDF, 904 KB
english, 2013