Synchrotron study of the formation of nanoclusters in...

Semiconductors 2013 / 10 Vol. 47; Iss. 10

Synchrotron study of the formation of nanoclusters in Al2O3/SiOx/Al2O3/SiOx/…/Si(100) multilayer nanostructures

Turishchev, S. Yu., Terekhov, V. A., Koyuda, D. A., Pankov, K. N., Ershov, A. V., Grachev, D. A., Mashin, A. I., Domashevskaya, E. P.
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Volume:
47
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S106378261310028X
Date:
October, 2013
File:
PDF, 343 KB
english, 2013
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