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Electrical and Photoelectric Properties of Polycrystalline Silicon after High-Intensity Short-Pulse Ion Implantation
Kabyshev, A. V., Konusov, F. V., Remnev, G. E.Volume:
56
Language:
english
Journal:
Russian Physics Journal
DOI:
10.1007/s11182-013-0075-8
Date:
November, 2013
File:
PDF, 416 KB
english, 2013