Measurement of the thickness of natural oxide on a silicon relief step structure
Gavrilenko, V. P., Zablotskii, A. V., Kuzin, A. A., Kuzin, A. Yu., Kuz’min, A. A., Ermakova, M. A., Mityukhlyaev, V. B., Rakov, A. V., Todua, P. A., Filippov, M. N.Volume:
56
Language:
english
Journal:
Measurement Techniques
DOI:
10.1007/s11018-013-0254-6
Date:
September, 2013
File:
PDF, 140 KB
english, 2013