Fabrication and characterization of a piezoelectric...

Fabrication and characterization of a piezoelectric micromirror using for optical data tracking of high-density storage

Zhao, Quanliang, Cao, Maosheng, Yuan, Jie, Lu, Ran, He, Guangping, Wang, Dawei
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1931-8
Date:
July, 2014
File:
PDF, 614 KB
english, 2014
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