Multilayer deposition of ceramic and metal at room...

The International Journal of Advanced Manufacturing Technology 2014 / 04 Vol. 72; Iss. 1-4

Multilayer deposition of ceramic and metal at room temperature using nanoparticle deposition system (NPDS) and planarization process

Chun, Doo-Man, Kim, Chung-Soo, Choi, Jung-Oh, Lee, Gil-Yong, Lee, Caroline Sunyong, Ahn, Sung-Hoon
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Volume:
72
Language:
english
Journal:
The International Journal of Advanced Manufacturing Technology
DOI:
10.1007/s00170-013-5327-9
Date:
April, 2014
File:
PDF, 650 KB
english, 2014
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