Fabrication, characterization and simulation of Ω-gate twin...

Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory

Yeh, Mu-Shih, Wu, Yung-Chun, Hung, Min-Feng, Liu, Kuan-Cheng, Jhan, Yi-Ruei, Chen, Lun-Chun, Chang, Chun-Yen
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Volume:
8
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/1556-276X-8-331
Date:
December, 2013
File:
PDF, 526 KB
english, 2013
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