Semiconductor fault detection and classification for yield...

Flexible Services and Manufacturing Journal 2013 / 09 Vol. 25; Iss. 3

Semiconductor fault detection and classification for yield enhancement and manufacturing intelligence

Chien, Chen-Fu, Hsu, Chia-Yu, Chen, Pei-Nong
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Volume:
25
Language:
english
Journal:
Flexible Services and Manufacturing Journal
DOI:
10.1007/s10696-012-9161-4
Date:
September, 2013
File:
PDF, 850 KB
english, 2013
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