[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - A surface micromachined MEMS capacitive microphone with back-plate supporting pillars
Je, Chang Han, Lee, Jaewoo, Yang, Woo Seok, Kwon, Jong-keeYear:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688399
File:
PDF, 462 KB
english, 2013