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A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements
Martin, David T., Liu, Jian, Kadirvel, Karthik, Fox, Robert M., Sheplak, Mark, Nishida, ToshikazuVolume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.909234
Date:
December, 2007
File:
PDF, 937 KB
english, 2007