A simple technology for superjunction device fabrication:...

IEEE Electron Device Letters 2002 / 10 Vol. 23; Iss. 10

A simple technology for superjunction device fabrication: polyflanked VDMOSFET

Kian Paau Gan,, Xin Yang,, Liang, Y.C., Samudra, G.S., Liu Yong,
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Volume:
23
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2002.803770
Date:
October, 2002
File:
PDF, 206 KB
english, 2002
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