2-D simulation of dual frequency capacitively coupled...

IEEE Transactions on Dielectrics and Electrical Insulation 2013 / 10 Vol. 20; Iss. 5

2-D simulation of dual frequency capacitively coupled helium plasma, using COMSOL multiphysics

Rebiai, S., Bahouh, H., Sahli, S.
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Dielectrics and Electrical Insulation
DOI:
10.1109/TDEI.2013.6633691
Date:
October, 2013
File:
PDF, 1.01 MB
english, 2013
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