SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Design, Fabrication, and Characterization of Photonic Devices - Development of a laser holographic interference lithography system
Gunawan, Oki, Hoe, Lui Whye, Ooi, Boon Siew, Chan, Yuen Chuen, Lam, Yee Loy, Zhou, Yan, Osinski, Marek, Chua, Soo-Jin, Chichibu, Shigefusa F.Volume:
3896
Year:
1999
Language:
english
DOI:
10.1117/12.370356
File:
PDF, 945 KB
english, 1999