SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachine Technology for Diffractive and Holographic Optics - Automated-interference-lithography-based systems for generation of submicron-feature size patterns
Hobbs, Douglas S., McLeod, Bruce D., Kelsey, Adam F., Leclerc, Mark A., Sabatino III, Ernest, Lee, Sing H., Cox, J. AllenVolume:
3879
Year:
1999
Language:
english
DOI:
10.1117/12.360517
File:
PDF, 2.09 MB
english, 1999