Formation of Ta/Ti/Al/Mo/Au ohmic contacts to an...

Semiconductors 2014 / 03 Vol. 48; Iss. 3

Formation of Ta/Ti/Al/Mo/Au ohmic contacts to an AlGaN/AlN/GaN heterostructure grown on a silicon substrate

Osipov, K. Yu., Velikovskiy, L. E., Kagadei, V. A.
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Volume:
48
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782614030208
Date:
March, 2014
File:
PDF, 461 KB
english, 2014
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