Flux and energy analysis of species in hollow cathode...

Review of Scientific Instruments 2010 Vol. 81; Iss. 12

Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper

Wu, L., Ko, E., Dulkin, A., Park, K. J., Fields, S., Leeser, K., Meng, L., Ruzic, D. N.
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3504371
File:
PDF, 611 KB
english, 2010
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