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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Characterization, modeling, and impact of scattered light in low-k1 lithography
La Fontaine, Bruno, Deng, Yunfei, Dusa, Mircea, Acheta, Alden, Fumar-Pici, Anita, Bolla, Harish, Cheung, Beverly, Singh, Bhanwar, Levinson, Harry J., Smith, Bruce W.Volume:
5754
Year:
2005
Language:
english
DOI:
10.1117/12.601188
File:
PDF, 378 KB
english, 2005