SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Optical Microlithography XII - Spatial frequency analysis of optical lithography resolution enhancement techniques
Brueck, Steven R. J., Chen, Xiaolan, Van den Hove, LucVolume:
3679
Year:
1999
Language:
english
DOI:
10.1117/12.354388
File:
PDF, 2.79 MB
english, 1999