Sealing Porous Low-k Dielectrics with Silica
de Rouffignac, Philippe, Li, Zhengwen, Gordon, Roy G.Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1814594
File:
PDF, 189 KB
english, 2004