Thin film thickness measurements using Scanning White Light...

Thin Solid Films 2014 / 01 Vol. 550

Thin film thickness measurements using Scanning White Light Interferometry

Maniscalco, B., Kaminski, P.M., Walls, J.M.

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Volume:

550

Language:

english

Journal:

Thin Solid Films

DOI:

10.1016/j.tsf.2013.10.005

Date:

January, 2014

File:

PDF, 1.05 MB

english, 2014

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