Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2003 Vol. 21; Iss. 4
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Optimization and characterization of III–V surface cleaning
Liu, Zhi, Sun, Yun, Machuca, Francisco, Pianetta, Piero, Spicer, William E., Pease, R. F. W.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1593644
File:
PDF, 319 KB
english, 2003