Optimization and characterization of III–V surface cleaning

Liu, Zhi, Sun, Yun, Machuca, Francisco, Pianetta, Piero, Spicer, William E., Pease, R. F. W.

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Volume:

Year:

2003

Language:

english

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

DOI:

10.1116/1.1593644

File:

PDF, 319 KB

english, 2003

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