The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics
2014 / 03 Vol. 68; Iss. 3
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Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
Hofmann, Sven, van Gils, Koen, van der Linden, Steven, Iseni, Sylvain, Bruggeman, PeterVolume:
68
Language:
english
Journal:
The European Physical Journal D
DOI:
10.1140/epjd/e2014-40430-3
Date:
March, 2014
File:
PDF, 1.94 MB
english, 2014