Time and spatial resolved optical and electrical...

Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Hofmann, Sven, van Gils, Koen, van der Linden, Steven, Iseni, Sylvain, Bruggeman, Peter
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Volume:
68
Language:
english
Journal:
The European Physical Journal D
DOI:
10.1140/epjd/e2014-40430-3
Date:
March, 2014
File:
PDF, 1.94 MB
english, 2014
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