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External magnetic field effect on the sheath dynamics and implantation profiles in the vicinity of a long step shaped target in plasma immersion ion implantation
Navab Safa, Nasrin, Ghomi, Hamid, Khoramabadi, Mansour, Ghasemi, Saeed, Niknam, Ali RezaVolume:
101
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.10.013
Date:
March, 2014
File:
PDF, 1.58 MB
english, 2014