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[IEEE 2010 International Conference on Microelectronic Test Structures (ICMTS) - Hiroshima, Japan (2010.03.22-2010.03.25)] 2010 International Conference on Microelectronic Test Structures (ICMTS) - Comprehensive quality assurance methodology for BSIM4.5 corner parameter extraction
Masuda, Hiroo, Itoh, Satoshi, Koike, Hiroshi, Wakita, Naoki, Inagaki, RyosukeYear:
2010
Language:
english
DOI:
10.1109/ICMTS.2010.5466819
File:
PDF, 283 KB
english, 2010