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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Characterization of water vapor permeation through thin film Parylene C
Menon, P. R., Li, W., Tooker, A., Tai, Y.C.Year:
2009
Language:
english
DOI:
10.1109/SENSOR.2009.5285687
File:
PDF, 430 KB
english, 2009